Scanning
Running a scan in nSpec is a multi-step process. Prior to running a scan, you must create and configure a number of scan settings.
Many of these prerequisite settings must be completed in order, because there are dependencies between them.
Every scan requires:
Imaging Settings, which sets imaging parameters like illumination mode, brightness, gain, exposure, objective.
Autofocus Settings, which configures the settings used during the autofocus phase of scanning.
North-South-Origin alignment for patterned samples, or Bare Wafer Alignment for non-patterned samples, which align the camera to the orientation and position of the sample on the stage.
Predictive Focus Pattern, which determine which points to measure the sample’s z-height during the autofocus phase of scanning.
Optional – Device Layout file for patterned samples.
While setting up scans, you can also setup an analysis to run immediately after the scan. These analyses are detailed in the Analysis section.