Alignment

Creating an alignment for an nSpec scan aligns the camera to the sample, and is a prerequisite for running a scan. Alignment files are created using either the Bare Wafer Alignment wizard for bare wafer samples, or the North-South-Origin Alignment wizard for patterned wafers. These alignment files contain information on the sample’s orientation and position on the stage.

Both alignment wizards can be found at nScan - Stage View > Stage.