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Post-Analysis Referencing

Overview

There are a few nSpec analyses that must take a previously run analysis as input. This includes Custom Reporter, Custom Exporter, Cropped Images, Report Summary Image Export and Defect Classifier. One or multiple previous analyses can be input to the post-analysis.

Parameters

All of these analyses include the Base Analysis IDs Mode and Base Analysis IDs parameters, which are used to reference the input analysis.

Parameter Name

Parameter Value

Description

Base Analysis IDs Mode 

Absolute, Relative 

Absolute points to the numeric integer reference of a previously run analysis.

Relative points to the most recently run analysis.

The Base Analysis ID parameter will vary depending on which mode is chosen.

Base Analysis ID

 

The user must input a comma separated set of IDs. 1 or more IDs can be input.

If the mode is Absolute, it is an integer or set of integers. For example,“1 or “1, 2”.

If the mode is Relative, it is an input analysis name. See the Analysis Reference List below for the Analysis Reference ID for each analysis.

For example, “DeviceInspection, Gen IV Analysis” means that the first input analysis will be the most recently run analysis of type Device Inspection, while the second input analysis will be the most recently run Gen IV Analysis.

Using Relative Mode

When using Relative mode, you also have the option to reference any previously run analysis, not just the most recently run analysis. by adding a numeric indicator at the end of the analysis name. Let’s say an image database ran 3 analyses:

  1. Gen IV AI Analysis (parameter set 1)

  2. Gen IV AI Analysis (parameter set 2)

  3. Device Inspection

To point at #2 and #3, you would input the following for the Base Analysis IDs field:

NONE
"DeviceInspection, Gen IV Analysis"

To point at #1 and #3, you would input the following for the Base Analysis IDs field:

CODE
"DeviceInspection, Gen IV Analysis.2"

The .2 at the end of Gen IV Analysis informs nSpec to reference the second most recently run Gen VI Analysis. In this way, you have complete flexibility to point at any previously run analysis using both absolute or relative modes.

If you wish to reference the most recent analysis, there is no need to add the “.1” after the analysis internal name reference. This means that “DeviceInspection” is the same as “DeviceInspection.1”

Internal Analysis Reference ID and User-Facing Analysis Names

The user-facing name of an analysis is not necessarily identical to the ID that should be used to reference that analysis. The following Analysis Reference ID values should be input to the Base Analysis ID parameter when using Relative mode.

Analysis Name (User facing)

Analysis Reference ID (IntName)

AI Analysis

AIAnalysis

Basic Selection (Contrast, Morphological Range)

nrad_rangeselect

Basic Selection (Intensity, Exclusive)

nrad_intensityselectexclusive

Basic Selection (Intensity, Inclusive)

nrad_intensityselectinclusive

Crack Detection V2

CrackDetectionV2

Custom Exporter

Custom Exporter

Custom Reporter

Custom Reporter

Device Inspection

DeviceInspection

Die Yield

nrad_dieyield

Dislocation Defect Analyzer

Dislocation

Gen IV AI Analysis

Gen IV Analysis

Gen V AI Analysis

GenVAnalysis

High Resolution Mosaic Generation

High Resolution Mosaic Generation Analysis

Surface Scattering Analysis

Surface Scattering Analysis

Utility: Launch Executable

LaunchScript

Using Absolute vs. Relative Mode

When running in production, we recommend always using relative mode.

When testing a new script, it might be useful to use absolute mode. However, in the majority of cases, we believe that relative mode is most likely to be the optimal mode, especially when running in production.

Consider a case where you scan a wafer and perform a Group Analysis on this scan. The first time, using absolute references to point at the 1st and 2nd analyses may work fine. But what happens if you run that group analysis a second time? Now, the post-analysis is still performed on the first and second analyses ever performed, rather than the ones most recently performed as part of that new analysis group.

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