SECS/GEM

SECS/GEM is an application-level communication protocol that is commonly used in the fab, or semiconductor fabrication, industry. Its primary purpose is to handle the details of sending/receiving commands from a master host control machine to several tools on the fab floor.

The exact SECS/GEM protocol specification is described here. nSpec uses third-party software to handle the protocol's implementation details.

The SECS/GEM protocol defines a large list of control commands that it supports. However, nSPEC handles a small subset of all the SECS/GEM defined control commands sent from host machines, e.g., start jobs remotely.